댧(do)wAM(jn)؛Դأ1Ї_(ti)ձn¼2ݿr(sh)īʿ3ӡR.P(gun)Ό(du)M(jn)ڰ댧(do)wAO(sh)M(jn)؛ֵ1.M(jn)؛ԺP(gun)ijɽr(ji)A(ch)ĵr(ji)궐r(ji)ɽr(ji)(jng)P(gun)δܴ_(yng)ԓ؛ͬһڇ^(q)ُM(jn)ͬ؛ijɽr(ji)A(ch)δܴ_(yng)ͬM(jn)؛ڇ(ni)Јl(f)r(ji)pȥM(jn)P(gun)M(jn)ڭh(hun)(ji)ԼM(jn)ں\(yn)ݔ}(ch)II(y)M(fi)ü궐r(ji)2P(gun)(du)M(jn)(bo)r(ji)挍(sh)БҪM(jn)M(jn)һfP(gun)(hu)ưl(f)r(ji)|(zh)֪ͨ_(d)M(jn)֪ͨʹڵc(din)M(jn)нጡǰ(yng)(dng)(zhn)ֵY磺̘I(y)늡ͬƷăr(ji)ϢM(jn)؛Ԕ(x)Ba(chn)ɱڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y)4ڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y).(du)M(jn)fC(j)댧(do)wAO(sh)Ȍڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y)M(jn)ڕr(sh)P(gun)(du)r(ji)Č(bo)ăr(ji),ͬڰ3(ni)ͬͻ댧(do)wAC(j)M(jn)ڃr(ji)60%ρ팏fC(j)ăr(ji),mȻµļҎ(gu)ُIr(ji),ڌ(sh)HM(jn)ڕr(sh)P(gun)һ㶼J(rn)ɵġҊM(jn)ڶְ댧(do)wO(sh)P(gun)У xעC(j)̾C(j)_יC(j)xϴC(j)̽_(ti)AиC(j)ȡڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y)
(j)SEMIĽy(tng)Ӌ(j)(sh)(j)Ŀǰȫ댧(do)wzy(c)O(sh)ЈҎ(gu)ģ800|ǰy(c)O(sh)ЈҎ(gu)ģ406|Ԫy(c)ԇO(sh)399|ԪS5G(lin)W(wng)g(sh)İl(f)չ惦(ch)S̼Ӵ(du)3DNANDѯBg(sh)Ͷ^m(x)Y_֧Lȫ(ni)댧(do)wzy(c)O(sh)ʬF(xin)^Ŕǰzy(c)O(sh)I(lng)(yng)òӋ(j)ռ(j)76%Јy(c)ԇҪ֞y(c)ԇC(j)̽_(ti)xC(j)Mɲy(c)ԇC(j)^I(y)Ҫ̩_(d)͐۵fռʷքes50%40%оƬy(c)ԇC(j)I(y)Ŕ(ni)Ay(c)غLƼڲּ(x)I(lng)Ҳͻƣм(chung)CISоƬy(c)ԇC(j)_ʼMemoryI(lng)B̽_(ti)Ҫǖ||ܣռʺӋ(j)^80%(ni)I(y)LƼ̎аl(f)A̎ڜy(c)ԇAxC(j)Ҫǐ۵f&ȣӋ(j)ռʺӋ(j)s60%(ni)cI(y)ҪLƼ_(ti)e늜y(c)ԇO(sh)Ĺ(yng)ҪڇI(y)(ni)(yng)̱^SM(jn)Ƴ̵ľԽԽ(x)za(chn)A(bo)U¼ٴΰl(f)o˾pʧ_(ti)e늌T200Ҏ(gu)ģƷ|(zh)zy(c)λİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)ᾀ(j)M(jn)ƷHSa_P(gun)ʺM(jn)ڭh(hun)(ji)M(fi)
KLA-Tencor:^̙zy(c)O(sh)䡢a(chn)Ʒ:^̙zy(c)O(sh)KLA-Tencor(ڰ댧(do)w댧(do)w)ȫ^̙zy(c)O(sh)1976ݹ1997ُTencorԭKLAעȱݙzy(c)QTencorty(c)QϲKLA-Tencor{õĬF(xin)M(jn)ُU(ku)KLA-TencorĮa(chn)ƷM(qing)˾ĸ(yu)(sh)Ŀǰ˾ڙzy(c)cy(c)I(lng)70%ϵЈռȫSCREEN:O(sh)a(chn)Ʒ:ϴC(j)SCREEN(϶ʿ˹W(wng))ȫϴC(j)1943λձ˾a(chn)ƷҪ댧(do)wO(sh)@ʾO(sh)PCBO(sh)댧(do)wO(sh)a(chn)ƷҪϴC(j)g@Ӱ/ͿϴC(j)sռȫ50%ϵЈ~ȫ2017ξAϴC(j)N~ռȫ39%Ј~ȫ;ʽϴC(j)sռȫ49%Ј~ȫ;spinscrubberϴC(j)sռȫ69%Ј~ȫASMPT:bO(sh)a(chn)Ʒ:bO(sh)+SMTO(sh)ASMPT(ASM̫ƽƼ)ȫ^ķbSMTO(sh)乩(yng)λ¼1975ۏĴģϼbģң1989˾Ҫa(chn)ƷbO(sh)SMTO(sh)ͷbзbO(sh)sռȫ25%Ј~
(ni)ICO(sh)乤ˇwԱ^a(chn)S̼g(sh)sa(chn)ȫICO(sh)߉ICa(chn)65/55nmˇwʲ31%40nmˇw17%28nmˇw16%;ڴ惦(ch)оƬa(chn)ϵšwʴżs15-25%SĦɷža(chn)S̼g(sh)sԱA(chung)gC(j)2007аl(f)8100nmO(sh)ȇHS8;2011аl(f)1265nmO(sh)ȇHS6;2013аl(f)1228nmO(sh)ȇHS3~4;2016аl(f)1214nmO(sh)ȇHS2~3ƬO(sh)ƬyȴO(sh)NƬǰ댧(do)w늳a(chn)Ҫԭ90%ϵļ·ڸ|(zh)ĹƬϵ(1)댧(do)wƬyȴڹƬ댧(do)wƬҪ_(d)99.%11(g)9ϣ̫ܼͨ(j)ྦྷϼͨ5-8(g)9(2)ƬֱԽyԽƬƂ乤ˇ̰:ξL?ci)⏽Lĥ(λۻ̎)Ƭǡĥ(g)߅p撁撁Kϴ(/˻)bƬֱɽ͆(g)оƬɱĿ00mmƬѳɞI(y)(ni)2017ȫ12؛esռƬwgC(j)M(jn)ڈ(bo)P(gun)˾xעC(j)M(jn)P(gun)(w)R_(ti)M(jn)ڈ(bo)P(gun)
AӹO(sh)̙C(j)gC(j)ĤeO(sh)(PVDCVD)g(sh)yȱ^ռȷքe30%25%25%A(y)Ӌ(j)2019ȫ̙C(j)gC(j)ĤeO(sh)ЈҎ(gu)ģքe127|Ԫ106|Ԫ106|Ԫȫָ߶ȼCR5ռ75%2018ȫ댧(do)wO(sh)(yng)ò|ķоASMLͿڰ댧(do)wASMLҹ˾a(chn)Ʒ^SI(y)Iվ^һك|Ԫ댧(do)wO(sh)T(do)¸ָ߶ȼĿǰȫ댧(do)wO(sh)ЈҪձmI(y)Ŕ2018ИI(y)CR5ռ75%CR10ռ91%ȫ댧(do)wO(sh)丂ֳʬF(xin)߶ȼРB(ti)(ni)O(sh)I(y)ƽʞ16%a(chn)O(sh)߀^g҇Ӌ(j)ʮ塱ĩa(chn)·O(sh)ڇ(ni)оƬS_(d)30%ȫ댧(do)wa(chn)ܴD(zhun)ƞ(ni)·O(sh)I(y)Ҫ?d)vʷC(j)2018҇댧(do)wO(sh)λNͬLĿǰ҇댧(do)wO(sh)^Ĺ˾c^e^(ni)댧(do)wO(sh)乫˾Շ(ni)ASͶY߷ӭҪİl(f)չr(sh)C(j)ָ߶ȼ(ni)O(sh)˾Ľ|(zh)gC(j)ɹM(jn)ˇHǰICSšn댧(do)wO(sh)M(jn)P(gun)˾M(jn)ڰ댧(do)wO(sh)(bo)P(gun)˾I(y)İ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)ͷԒ
댧(do)wM(jn)ڈ(bo)P(gun)ҪI(y)Ĉ(bo)P(gun)˾ߴˁf(xi)ڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y)
ǰЩ҇댧(do)wO(sh)Ϣ댧(do)wO(sh)䣨Ϻ˾Ƶ5nmxwgC(j)(jng)_(ti)e(yn)C܃(yu)ȫחl5nmƳa(chn)gC(j)оƬP(gun)Ib֮һͻP(gun)Ig(sh)Ї족QgC(j)H(du)҇ꑰ댧(do)wO(sh)I(y)һֱŬsHM(jn)_ڶNO(sh)I(lng)һͻ댧(do)w5nmxwgC(j)֮ԽԽĮa(chn)Ʒɑ(yng)14nm7nmƳ(ni)O(sh)cM(jn)O(sh)^ҪF(xin)ڃɷ棺һһĮa(chn)ƷƳϵIJDz֮a(chn)Ʒȫ]иδ(ni)̙C(j)SH_(d)90nmĹҪ(ni)̽_(ti)Ҳ̎аl(f)Aδ(sh)F(xin)Nôڇҵķ(jng)^@ôİl(f)չ҇댧(do)wO(sh)(g)(x)I(lng)İl(f)չrP(gun)I(y)Щl(f)չʲố̶һA(chung)Ӻͱӑ(zhn)ؽMIϴC(j)tw|(zh)(MFC)Ȱ댧(do)wb估ԪȘI(y)(w)߀LJ(ni)O(sh)ԴbҪ(yng)IgO(sh)ڷ(w)õİ댧(do)wO(sh)M(jn)ڈ(bo)P(gun)I(y)
fM(jn)Q(mo)ͨ(yng)朣Ϻ˾̄(w)(w)һҷ(w)˾˾I(y)(w)wM(jn)ڈ(bo)P(gun)˾yƷM(jn)ڈ(bo)P(gun)O(sh)M(jn)ڈ(bo)P(gun)M(jn)ʳƷ(bo)P(gun)r(ji)Ʒ|(zh)бC˾ע|(zh)Է(w)\Ş鱾̄(w)(w)Ʒơ(hu)Ķ֧m(x)(chung)T|(zh)(w)w(yn)͑ɹṩ(jin)(sh)֧